The development of large scale integrated circuit, the determination of the micro water in high purity gases put forward higher requirements.
Sxiangyinn eagle analysis technology co., LTD. Is in high purity gases of trace moisture determination conditions for the gas phase spectrum system research, made a simple analysis method, and used in scientific research and production of high purity gas N_2, H_2, Ar of trace moisture content were determined, the results satisfactory.
大規(guī)模集成電路的發(fā)展,對(duì)高純氣體中微zui水份的測(cè)定提出了更高的要求。
滕州市翔鷹分析技術(shù)有限公司就高純氣體中微量水份的氣相譜測(cè)定條件進(jìn)行了系統(tǒng)的研究,制訂了一個(gè)簡(jiǎn)便可行的分析方法,并對(duì)科研生產(chǎn)中使用的高純氣體N_2、H_2、Ar中微量水份含量進(jìn)行了測(cè)定,結(jié)果滿意。