高真空磁控濺射設備 AccuSputter AW 4450 系列
設備主要配置（典型）：
1.PE4450系列主框架。
2.DC可編程10KW電源。型號：Advanced Energy, MDX-10k 或者DC可編程5KW電源。型號：Advanced Energy, MDX-5k （可選）
3.RF發生器,功率1200W。型號：ENI，OEM-12A（可選）
4.DC濺射功能（可選）
5.RF濺射功能（可選）
6.RF刻蝕（清洗）功能（可選）
7. RF Bias濺射功能（可選）
8.系統配置三只三角形（Delta）靶陰極（靶和靶材由客戶負責選擇、提供）或者四個2-8英寸圓靶陰極
9.自動RF Matching。（可選）
10.Cryopump冷泵及壓縮機。
11.Load lock功能。
12.機械泵，分子泵（可選）
13.靶陰極以及襯底均可冷卻。
14.MFC: 兩套，Ar 100 SCCM和 N2 100 SCCM（可選zui多三路）
15.承片盤可以放厚度在1毫米，直徑0-200毫米樣品
16.承片臺一次可以放置12片4英寸片，7片6英寸，一次可以濺射1-12片4英寸片或1-7片6英寸片
17.濺射均勻性：厚度誤差<5%
18.濺射速度：實現濺射金：>200A/分鐘/KW，金鍺>100A/分鐘/KW，鈦: >80A/分鐘/KW
控制軟件
Allwin21濺射臺升級套件。
1、系統采取全新觸摸屏電腦控制，Allwin21控制軟件,可以實時數據采集和監控，工藝數據和結果可以電腦存儲，GUI界面。
2、系統設置等級口令控制，使管理者、工藝工程師和操作員根據不同*等級使用軟件。
3、用戶可以通過GUI界面，方便地手動控制和診斷包括傳片、模式選擇、靶位、功率、承片臺升降、承片臺轉速、泵閥開關和氣體流量等功能和參數，也可以手動進行工藝操作。
用戶可自行編寫工藝菜單，設定工藝步驟、工藝時間、承片臺轉速、氣體流量、真空度和功率等基本工藝參數。系統可以根據工藝菜單自動運行工藝流程。各種工藝流程的工藝菜單可作為文件保存，調用方便。
a
主要設備
保護氣氛快速退火爐
AccuThermo AW 410
AccuThermo AW 610
AccuThermo AW 810
AccuThermo AW 820
AccuThermo AW 830
其他半導體設備
半導體量測設備
KLATencor M-Gage 300
AccuMgage 350
AccuMgage 400
HP 4062UX
HP 4145A/B
EG 2001 Wafer Probe
EG 1034 Wafer Probe
Hitachi CD-SEMI 8820
Hitachi CD-SEM 8840
HItachi CD-SEM 9200
HItachi CD-SEM 9220
Hitachi CD-SEM 9260
HItachi FE-SEM S-4000
HItachi FE-SEM S-4500
HItachi FE-SEM S-4700
HItachi FE-SEM S-4800
HItachi FE-SEM S-5000
HItachi FE-SEM S-5200磁控濺射設備
AccuSputter AW 4450 Series
Perkin-Elmer 4400
Perkin-Elmer 4410
Perkin-ELmer 4450
Perkin-Elmer 4480
Perkin-Elmer 2400等離子刻蝕設備
Tegal 901e
Tegal 903e
Tegal 901e TTW
Tegal 903e TTW
Lam Research AutoEtch 490
Lam Research AutoEtch 590
Lam Research AutoEtch 690
Lam Research AutoEtch 790
Lam Research Rainbow 4420
Lam Research Rainbow 4520
Lam Research Rainbow 4620
Lam Research Rainbow 4720
Lam Research Rainbow 4428
Lam Research Rainbow 4528
Lam Research Rainbow 4628
Lam Research Rainbow 4728
Matrix 303
Gasonics AE 2001等離子去膠機掃底膜機
Matrix 105R
Matrix 105
Gasonics Aura 1000
Gasonics Aura 2000LL
Gasonics Aura 3000
Gasonics Aura 3010
Gasonics L3510
Branson IPC 3000
Branson IPC L3200真空快速退火爐
AccuThermo AW 610V
AccuThermo AW 820V
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